Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation
| Autor: | Peterson, C. A., Vermeire, B., Sarid, D., Parks, H. G. |
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| Zdroj: | Applied Surface Science; 2001, Vol. 181 Issue: 1-2 p28-34, 7p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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