| Autor: |
Mohd Nor, Nurul Izza, Shah, Kriyang, Singh, Jugdutt, Sauli, Zaliman |
| Zdroj: |
Advanced Materials Research; April 2013, Vol. 662 Issue: 1 p556-561, 6p |
| Abstrakt: |
This paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k2eff) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10-4µm2 and 7.84x10-4µm2 for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6%. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
