The charging mechanism of insulated electrode in negative-ion implantation
| Autor: | Sakai, S., Gotoh, Y., Tsuji, H., Toyota, Y. |
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| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1995, Vol. 96 Issue: 1 p43-43, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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