| Autor: |
Kul'ment'ev, A.I., Storizhko, V.E., Zabashta, O.I. |
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B; March 1994, Vol. 85 Issue: 1-4 p633-636, 4p |
| Abstrakt: |
This paper discusses the potential of the resonant NRA technique for measuring the impurity depth profiles. An integrated program package is developed for analysis of the experimental data with high depth resolution. The input information for the package consists of the experimental yield from the impurity reaction selected. The impurity profile can be obtained by solving either a direct or an inverse problem. In the former case the simulated yield from the assigned profile is fitted to the experimental yield. In the latter case the depth profile is obtained by solving the theoretical yield equation. Since the latter procedure is an incorrect problem, we used Tikhonov's regularization method. This approach allows a correct inclusion of the experimental yield errors as well as of the assumptions made in the model describing the incident ion beam interaction with the material. The equation for the yield is derived taking into account the energy distribution of the initial beam, energy loss straggling, resonance width and Doppler effect. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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