Diffusion and clustering of supersaturated carbon in SiGeC layers under oxidation
| Autor: | Napolitani, E., Salvador, D. De, Coati, A., Berti, M., Drigo, A. V., Carroll, M. S., Sturm, J. C., Stangl, J., Bauer, G., Spinella, C. |
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| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 2002, Vol. 186 Issue: 1 p212-217, 6p |
| Databáze: | Supplemental Index |
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