Characterization of TiCN coatings deposited by magnetron sputter-ion plating process: RBS and GDOS complementary analyses

Autor: Freire, F. L., Senna, L. F., Achete, C. A., Hirsch, T.
Zdroj: Nuclear Instruments and Methods in Physics Research Section B; 1998, Vol. 136 Issue: 1 p788-792, 5p
Databáze: Supplemental Index