The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation
| Autor: | Valiev, S. H., Pugacheva, T. S., Jurabekova, F. G., Lem, S. A., Miyagawa, Y. |
|---|---|
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1997, Vol. 127 Issue: 1 p265-268, 4p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
Full Text from ScienceDirect