Computer simulation of SiC and B~4C sputtering by Ar^+ and He^+ ions bombardment
| Autor: | Pugacheva, T. S., Jurabekova, F. G., Miyagawa, Y., Valiev, S. K. |
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| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1997, Vol. 127 Issue: 1 p260-264, 5p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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