Room temperature migration of ion beam injected point defects in crystalline silicon
| Autor: | Privitera, V., Coffa, S., Priolo, F., Larsen, K. Kyllesbech, Libertino, S., Carnera, A. |
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| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1996, Vol. 120 Issue: 1 p9-13, 5p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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