Different methods for the determination of damage profiles in Si from RBS-channeling spectra: a comparison

Autor: Albertazzi, E., Bianconi, M., Lulli, G., Nipoti, R., Cantiano, M.
Zdroj: Nuclear Instruments and Methods in Physics Research Section B; 1996, Vol. 118 Issue: 1 p128-132, 5p
Databáze: Supplemental Index