Different methods for the determination of damage profiles in Si from RBS-channeling spectra: a comparison
Autor: | Albertazzi, E., Bianconi, M., Lulli, G., Nipoti, R., Cantiano, M. |
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Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1996, Vol. 118 Issue: 1 p128-132, 5p |
Databáze: | Supplemental Index |
Externí odkaz: |