Influence of damage on the formation of CoSi~2 by Co implantation

Autor: Zentgraf, A., Gaertner, K., Schippel, S., Gaiduk, P. I.
Zdroj: Nuclear Instruments and Methods in Physics Research Section B; 1996, Vol. 114 Issue: 1 p46-55, 10p
Databáze: Supplemental Index