Influence of damage on the formation of CoSi~2 by Co implantation
Autor: | Zentgraf, A., Gaertner, K., Schippel, S., Gaiduk, P. I. |
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Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1996, Vol. 114 Issue: 1 p46-55, 10p |
Databáze: | Supplemental Index |
Externí odkaz: |