Copper passivation of boron in Si1-xGex alloys and boron reactivation kinetics
| Autor: | Barthula, M., Aboelfotoh, M. O., Meyer, F. |
|---|---|
| Zdroj: | Microelectronic Engineering; 2001, Vol. 55 Issue: 1 p323-328, 6p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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| Autor: | Barthula, M., Aboelfotoh, M. O., Meyer, F. |
|---|---|
| Zdroj: | Microelectronic Engineering; 2001, Vol. 55 Issue: 1 p323-328, 6p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
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