Basic mechanisms involved in the Smart-Cut process
| Autor: | Aspar, B., Bruel, M., Moriceau, H., Maleville, C., Poumeyrol, T., Papon, A. M., Claverie, A., Benassayag, G., Auberton-Herve, A. J., Barge, T. |
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| Zdroj: | Microelectronic Engineering; 1997, Vol. 36 Issue: 1 p233-240, 8p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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