Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching
| Autor: | Strzelecka, E. M., Robinson, G. D., Coldren, L. A., Hu, E. L. |
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| Zdroj: | Microelectronic Engineering; 1997, Vol. 35 Issue: 1 p385-388, 4p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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