A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
| Autor: | Rothuizen, H., Prongue, D., Vasey, F., Vettiger, P. |
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| Zdroj: | Microelectronic Engineering; 1997, Vol. 34 Issue: 3 p243-260, 18p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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