Ion beam etching mechanism of PMMA based resists by noble gas ions
| Autor: | Borzenko, T. B., Koval, Y. I., Kudryashov, V. A. |
|---|---|
| Zdroj: | Microelectronic Engineering; 1994, Vol. 23 Issue: 1 p337-337, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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| Autor: | Borzenko, T. B., Koval, Y. I., Kudryashov, V. A. |
|---|---|
| Zdroj: | Microelectronic Engineering; 1994, Vol. 23 Issue: 1 p337-337, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|