Verification of 2-D MEMS model using optical profiling techniques
| Autor: | Hill, M., O`Mahony, C., Berney, H., Hughes, P. J., Hynes, E., Lane, W. A. |
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| Zdroj: | Optics and Lasers in Engineering; 2001, Vol. 36 Issue: 2 p169-183, 15p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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