Laser processing of amorphous silicon for large-area polysilicon imagers

Autor: Boyce, J. B., Fulks, R. T., Ho, J., Lau, R., Lu, J. P., Mei, P., Street, R. A., Schuylenbergh, K. F. Van, Wang, Y.
Zdroj: Thin Solid Films; 2001, Vol. 383 Issue: 1 p137-142, 6p
Databáze: Supplemental Index