Theoretical study of penetration reaction of fluorine atoms and ions into hydrogen-terminated Si(111) thin film
| Autor: | Makino, O., Sakata, K., Yamazaki, H., Iguchi, K., Tachibana, A. |
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| Zdroj: | Thin Solid Films; 2000, Vol. 374 Issue: 2 p143-149, 7p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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