RHEED investigation of limiting thickness epitaxy during low-temperature Si-MBE on (100) surface

Autor: Nikiforov, A. I., Kanter, B. Z., Pchelyakov, O. P.
Zdroj: Thin Solid Films; 1998, Vol. 336 Issue: 1 p179-182, 4p
Databáze: Supplemental Index