SiC formation and influence on the morphology of polycrystalline silicon thin films on graphite substrates produced by zone melting recrystallization
| Autor: | Hauttmann, S., Kunze, T., Muller, J. |
|---|---|
| Zdroj: | Thin Solid Films; 1998, Vol. 326 Issue: 1 p175-179, 5p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
Full Text from ScienceDirect