Synthesis and characterization of amorphous carbon nitride films
| Autor: | Holloway, B. C., Shuh, D. K., Kelly, M. A., Tong, W., Carlisle, J. A., Jimenez, I., Sutherland, D. G. J., Terminello, L. J., Pianetta, P., Hagstrom, S. |
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| Zdroj: | Thin Solid Films; 1996, Vol. 290 Issue: 1 p94-98, 5p |
| Databáze: | Supplemental Index |
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