Characterization of different porous silicon structures by spectroscopic ellipsometry
| Autor: | Fried, M, Lohner, T, Polgár, O, Petrik, P, Vázsonyi, É, Bársony, I, Piel, J.P, Stehle, J.L |
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| Zdroj: | Thin Solid Films; April 1996, Vol. 276 Issue: 1-2 p223-227, 5p |
| Abstrakt: | The results of multiparameter fitting of spectroscopic ellipsometric (SE) spectra on porous silicon layers (PSL) were connected with the processing parameters (oxidation, etching time, porosity, argon implantation dose). |
| Databáze: | Supplemental Index |
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