| Abstrakt: |
Piezoresistive sensors, which have been widely studied and applied to several applications, are usually made of a piezoresistive membrane attached to a flexible substrate, a plate. A topology optimization formulation for the design of piezoresistive plate-based sensors, for which the piezoresistive membrane disposition is optimized together with the substrate, is proposed in this work. The objective is to maximize the sensor sensitivity to external loading, as well as the stiffness of the sensor to particular loads. A material model for the piezoresistive membrane based on the Solid IsotropicMaterial with Penalizationmodel, and perfect coupling conditions between the plate and the membrane based on the "layerwise" theory for laminated plates are employed. Results for an AFM probe suggest that the performance of the sensors can be improved by using the proposed approach. |
