Electromigration evaluation of aluminum alloys in multilevel metallization
| Autor: | Givens, J. H., Miller, L. A., Porth, B. W., Serafin, R. A. |
|---|---|
| Zdroj: | Thin Solid Films; 1992, Vol. 220 Issue: 1 p14-14, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
| Autor: | Givens, J. H., Miller, L. A., Porth, B. W., Serafin, R. A. |
|---|---|
| Zdroj: | Thin Solid Films; 1992, Vol. 220 Issue: 1 p14-14, 1p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|