Effects of substrate temperature, deposition pressure, and thickness on the morphology of ultrathin platinum film on SiO~2/Si substrate

Autor: Esfahani, R. N., Maclay, G. J., Zajac, G. W.
Zdroj: Thin Solid Films; 1992, Vol. 219 Issue: 1 p257-257, 1p
Databáze: Supplemental Index