Bimodal crystal size distribution in annexed r.f. magnetron silicon films: a memory effect of the local order inhomogeneities in the initial amorphous state

Autor: Touir, H., Dixmier, J., Zellama, K., Morhange, J.-F., Elkaim, P.
Zdroj: Journal of Non-Crystalline Solids; 1998, Vol. 227 Issue: 1 p906-910, 5p
Databáze: Supplemental Index