Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part I: Mechanical Design and Characterization
| Autor: | Reck, T. J., Chen, Lihan, Zhang, Chunhu, Arsenovic, A., Groppi, C., Lichtenberger, A. W., Weikle, R. M., Barker, N. S. |
|---|---|
| Zdroj: | Terahertz Science and Technology, IEEE Transactions on; November 2011, Vol. 1 Issue: 2 p349-356, 8p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|