| Autor: |
Yang, Ping, Takamura, Tomohiko, Takahashi, Satoru, Takamasu, Kiyoshi, Sato, Osamu, Osawa, Sonko, Takatsuji, Toshiyuki |
| Zdroj: |
Proceedings of SPIE; September 2011, Vol. 8133 Issue: 1 p81330T-81330T-9, 731980p |
| Abstrakt: |
We described a multi-probe system comprising three laser interferometers and one autocollimator to measure a flat bar mirror profile with nanometer accuracy. The simulation and pre-experiment of multi-probe system have been conducted on an X-Y linear stage which is composed of a ball bearing slider and a stepping motor. The two standard deviation of the flat bar mirror profile is mainly fitting the range of simulation results (±20 nm). Comparison of our measured data with the results measured by ZYGO white light interferometer system showed agreement to within approximately ±30 nm, excluding some points at the edge of the mirror. From the pre-experiment results, we conclude that the systematic error caused by accuracy of the moving stage can't be ignored. To eliminate this systematic error, the multi-probe system has been implemented on a high-precision micro-coordinate measuring machine (M-CMM) that has been built at the Advanced Industrial Science and Technology (AIST). |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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