Development of a modular, large-scale, high-throughput semicontinuous-mode liquid-phase epitaxy system
| Autor: | Mauk, M. G., Shellenbarger, Z. A., Sims, P. E., Bloothoofd, W., McNeely, J. B., Collins, S. R., Rabinowitz, P. I., Hall, R. B., DiNetta, L. C., Barnett, A. M. |
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| Zdroj: | Journal of Crystal Growth; 2000, Vol. 211 Issue: 1 p411-415, 5p |
| Databáze: | Supplemental Index |
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