| Autor: |
Couceiro, Iakyra B., Ferreira da Silva, Thiago, Tarelho, Luiz V. G., Azeredo, Carlos L. S., Malinovski, Igor, Grieneisein, Hans P. H., Barros, Wellington S., Faria, Giancarlo V., von der Weid, Jean P., Amaral, Marcello M., Raele, Marcus P., de Freitas, Anderson Z. |
| Zdroj: |
Proceedings of SPIE; May 2011, Vol. 8082 Issue: 1 p80822P-80822P-10, 8001389p |
| Abstrakt: |
This paper presents a methodology for providing traceability to OCT measurements linked to Length SI unit. The link to primary length standard is provided by an interference microscope (IM). The chosen transfer standard was a step height gauge block. The results for IM and OCT showed good agreement for step height standards, such that the OCT will be able to perform reliable measurements of complex surface topographies and to ensure traceability to the length scale. The main uncertainty components were evaluated for the OCT system. In addition, OCT also was used for measuring a surface roughness standard -a depth standard - in order to test this methodology for round groove profiles. Results were found to be in good agreement with the calibration certificate. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
