| Abstrakt: |
Nanometer two-dimensional platform can realize the accurate positioning of X and Y coordinate, and it is the important parts of Nanometer Coordinate Measuring Machines (Nano-CMM),in order to realize the demand of large scale nanometer position , the magnetic stage is adopted, and magnetic stage control system is researched in this paper ,and designed the current loop, velocity loop and position loop controller, and the affection of variable control parameters are researched, and at last the magnetic stage system is realized. |
