Diffraction theory of the knife-edge test and its improved form, the phase-contrast method
Autor: | Zernike, F. |
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Zdroj: | The Journal of Microlithography, Microfabrication, and Microsystems; July 2002, Vol. 1 Issue: 2 p87-94, 8p |
Databáze: | Supplemental Index |
Externí odkaz: |