Solubility of Impurities in Silicon Carbide during Vapor Growth

Autor: Parfenova, I., Reshanov, S., Rastegaev, V.
Zdroj: Inorganic Materials; May 2002, Vol. 38 Issue: 5 p476-481, 6p
Abstrakt: The atomic displacements and the chemical and deformation contributions to the change in the bond energy of Group III–V substitutional impurities in β-SiC were calculated by Harrison's bonding-orbital method. The results were used to determine the lattice parameter as a function of doping level and the solubility of impurities in SiC under both equilibrium and nonequilibrium conditions on different growth surfaces. The calculation results agree well with experimental data.
Databáze: Supplemental Index