| Autor: |
Oudwan, Maher, Moustapha, Oumkelthoum, Abramov, Alexey, Daineka, Dmitriy, Bonnassieux, Yvan, Cabarrocas, Pere Roca i |
| Zdroj: |
Physica Status Solidi (A) - Applications and Materials Science; May 2010, Vol. 207 Issue: 5 p1245-1248, 4p |
| Abstrakt: |
The crucial influence of the interface between the gate dielectric and intrinsic layer has been studied in detail for amorphous silicon, polymorphous silicon and microcrystalline silicon bottom gate thinfilm transistors. We show that the electrical parameters of the TFTs depend directly on the quality of this interface, which can be strongly degraded by a vacuum break. A hydrogen plasma pretreatment of this interface greatly improves the electrical characterstics of polymorphous silicon TFTs, the mobility increases from 0.4 to 0.75 cm2V s while their subthreshold slope decreases from 1 to 0.7 Vdec. Moreover, we show that these improvements also translate into more stable TFT characteristics. Finally, microcrystalline silicon TFTs show the best stability and a nitrogenplasma treatment of the dielectric improves their stability. |
| Databáze: |
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