Autor: |
Martin, P. J., Macleod, H. A., Netterfield, R. P., Pacey, C. G., Sainty, W. G. |
Zdroj: |
Applied Optics; January 1983, Vol. 22 Issue: 1 p178-184, 7p |
Abstrakt: |
Some effects on the properties of electron-beam evaporated thin films produced by ion bombardment of the growing film are reported. Substantial increases in the packing densities of SiO_2, TiO_2, and ZrO_2 films have been produced as measured by the reduction in the adsorption of moisture when the films are exposed to a humid atmosphere. In a ZrO_2–SiO_2 multilayer interference filter, changes in the wavelength of the peak transmittance on exposure to the atmosphere have been reduced from 8 nm for films deposited without ion bombardment to <1 nm for ion-beam-assisted films. |
Databáze: |
Supplemental Index |
Externí odkaz: |
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