Step Heights from Interferograms
| Autor: | Primak, W. |
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| Zdroj: | Applied Optics; December 1973, Vol. 12 Issue: 12 p2894-2897, 4p |
| Abstrakt: | For the precise determination of a step height, the surface contour in the vicinity of the step must be determined. Methods that have proven satisfactory even in the presence of aberrations caused by poor flatness of object or comparison mirrors, by auxiliary optics, or by subsequent processing are described. |
| Databáze: | Supplemental Index |
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