Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency
| Autor: | Väinölä, Hele, Zhang, Peng, Haarahiltunen, Antti, Istratov, Andrei A., Weber, Eicke R. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; September 2003, Vol. 95 Issue: 1 p581-586, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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