Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods
| Autor: | Zaumseil, P., Krüger, D., Kurps, R., Fursenko, O.V., Formanek, Peter |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; September 2003, Vol. 95 Issue: 1 p473-482, 10p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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