Tribological Characterization of Post-CMP Brush Scrubbbing
| Autor: | Philipossian, Ara, Mustapha, Lateef |
|---|---|
| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; May 2003, Vol. 92 Issue: 1 p275-280, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|