Megasonic Silicon Wafer Cleaning and Its Influence on LSI Devices
| Autor: | Tomozawa, Akihiro, Ohnishi, Akihiro, Kinoshita, Hideo, Nakano, Takashi |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; January 2001, Vol. 76 Issue: 1 p235-240, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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