Surface Preparation Challenge on Nitrided Gate Oxides
| Autor: | Garnier, Philippe, Barge, David, Bienacel, Jerome, Tavel, Brice, Cabuil, Nicolas, Lévy, Didier, Barla, Kathy |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; November 2007, Vol. 134 Issue: 1 p71-74, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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