Critical Thickness Threshold in HfO2 Layers

Autor: Besson, Pascal, Loup, Virginie, Salvetat, Thierry, Rochat, Névine, Lhostis, Sandrine, Favier, Sylvie, Dabertrand, Karen, Cosnier, Vincent
Zdroj: Diffusion and Defect Data Part B: Solid State Phenomena; November 2007, Vol. 134 Issue: 1 p67-70, 4p
Abstrakt: Not Available
Databáze: Supplemental Index