Etch Rate Profile Characterization of High-κ Materials
| Autor: | Votta, Annamaria, Bellandi, Enrico, Piagge, Rosella, Caniatti, Massimo, Pipia, Francesco, Alessandri, Mauro |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; November 2007, Vol. 134 Issue: 1 p63-66, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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