Behaviour of Metallic Contaminants during Mos Processing
| Autor: | Bearda, Twan, De Gendt, Stefan, Loewenstein, Lee M., Knotter, M., Mertens, Paul W., Heyns, Marc M. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; November 1998, Vol. 65 Issue: 1 p11-14, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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