The Rinsing Problem: Effect of Solute-Surface Interactions on Wafer Purity
| Autor: | Loewenstein, Lee M., Mertens, Paul W. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; November 1998, Vol. 65 Issue: 1 p1-6, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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