Identification of Process Induced Defects in Silicon Power Devices
| Autor: | Astrova, E.V., Kozlov, V.A., Lebedev, A.A., Voronkov, V.B. |
|---|---|
| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; August 1999, Vol. 69 Issue: 1 p539-544, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|