Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon
| Autor: | Kögler, R., Peeva, A., Anwand, W., Werner, P., Danilin, A.B., Skorupa, Wolfgang |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; August 1999, Vol. 69 Issue: 1 p235-240, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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