Metal Gettering by Defective Regions in Carbon-Implanted Silicon
| Autor: | Kögler, R., Kaschny, J.R., Yankov, R.A., Werner, P., Danilin, A.B., Skorupa, Wolfgang |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; July 1997, Vol. 57 Issue: 1 p63-68, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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