Gettering in Advanced Low Temperature Processes
| Autor: | Sadamitsu, S., Ogushi, S., Koike, Y., Reilly, N., Nagashima, T., Sano, Mizuka, Tsuya, H. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; July 1997, Vol. 57 Issue: 1 p53-62, 10p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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